英语语法分析

In this article, deep submicron lithography and nano processing are reviewed.

本文综述了深亚微米光刻和纳米光刻技术。

With deep submicron technology, crosstalk noise becomes more and more serious.

随着深亚微米技术，串扰噪声问题越来越严重。

This paper introduces a novel submicron etching technology for emitter window.

介绍了一种新的亚微米发射极窗口刻蚀工艺。