英语语法分析

Beacause of its higher accuracy, Phase Measuring Profilometry is one of the most important methods.

由于具有很高的精度，位相测量轮廓术是其中一种重要的方法。

This paper introduces the beam profile characteristics of excimer lasers and the beam profilometry.

介绍了准分子激光的波面特性以及波面分析测量技术。

Because of the precision of phase measuring profilometry, it is an important way of three-dimensional measuring.

三维面形测量具有很高精度，位相测量轮廓术是其中一种重要方法。