The integration technology of the heater and piezoresistor on one ultrathin cantilever has been finally completed.
最终开发出在微型悬臂梁上集成了电阻加热器、压阻敏感器和纳米针尖的纳机电探针制造技术。
The offset thermal drift of pressure sensor is influenced by piezoresistor mismatch and its leakage current in practical applications.
本文结合目前应用比较普遍的各种补偿计算方法 ,通过编制程序 ,对压力传感器热零点漂移现象作了补偿。
ZnO can be used to fabricate transparency electrode, piezoresistor, cell battery window, surface acoustic wave device, gas sensor and light-emitting diode etc.