英语语法分析

Why not use photolithography to make nano structures?

为什么不使用光蚀刻法制造奈米结构？

Spherical aberration can damage image quality in photolithography.

球面像差能破坏光刻的成像质量。

First, consider the advantages and disadvantages of photolithography.

首先，想想光蚀刻法的优点跟缺点。