英语语法分析

The micromachining process like photolithograph, electroplate and sputtering etc is adopted to fabricate the stator of MGELR.

采用了光刻、电镀、溅射等微细加工工艺制造了MGELR的定子。

They include laser doping, laser annealing, laser depositing film, solid-phase reaction induced by laser and laser photolithograph.

这些应用大致涵盖激光掺杂、激光退火、激光沉积薄膜、激光引发固相反应和激光光刻等几方面。